Titanium disilicide[1] | |
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Titanium disilicide |
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Other names
Titanium silicide |
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Identifiers | |
CAS number | 12039-83-7 |
PubChem | 6336889 |
Properties | |
Molecular formula | TiSi2 |
Molar mass | 104.038 g/mol |
Appearance | black orthorhombic crystals |
Density | 4.02 g/cm3 |
Melting point |
1470°C |
Solubility in water | insoluble |
Solubility | soluble in HF |
Related compounds | |
Other cations | Zirconium disilicide Hafnium disilicide |
(verify) (what is: / ?) Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa) |
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Infobox references |
Titanium disilicide (TiSi2) is an inorganic chemical compound.
Titanium silicide is used in semiconductor industry. It's typically grown by means of salicide technology over silicon and polysilicon lines to reduce the sheet resistance of local transistors connections. In microelectronic industry is typically used in the C54 phase.
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